In the semiconductor industry, nitrogen is widely used as purge gas and carrier gas in the field of electronic products. High-purity nitrogen is used as an inert agent in epitaxial growth furnace and can also be used as carrier gas in laboratory analysis. Other common applications of zero calibration gas and balance gas include heat treatment.

Solution 1
The service pressure of high-purity nitrogen is low, generally less than 2.5 bar. We recommend the use of high-nitrogen equipment with positive flow expansion. For more information on such products, please click here (High purity Nitrogen plant -- Positive flow Expansion)

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Solution 2
The use pressure of high-purity nitrogen is relatively high, generally 5-8 bar, so we recommend the use of high purity nitrogen equipment with reflux expansion. For details of such products, please click here (High-nitrogen Equipment -- Reflux expansion).

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